JPH0735716Y2 - リニア駆動装置におけるカップリング装置 - Google Patents

リニア駆動装置におけるカップリング装置

Info

Publication number
JPH0735716Y2
JPH0735716Y2 JP1988041903U JP4190388U JPH0735716Y2 JP H0735716 Y2 JPH0735716 Y2 JP H0735716Y2 JP 1988041903 U JP1988041903 U JP 1988041903U JP 4190388 U JP4190388 U JP 4190388U JP H0735716 Y2 JPH0735716 Y2 JP H0735716Y2
Authority
JP
Japan
Prior art keywords
coupling
linear
linear drive
drive device
elastic material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988041903U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01148247U (en]
Inventor
勉 新谷
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP1988041903U priority Critical patent/JPH0735716Y2/ja
Publication of JPH01148247U publication Critical patent/JPH01148247U/ja
Application granted granted Critical
Publication of JPH0735716Y2 publication Critical patent/JPH0735716Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
JP1988041903U 1988-03-31 1988-03-31 リニア駆動装置におけるカップリング装置 Expired - Lifetime JPH0735716Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988041903U JPH0735716Y2 (ja) 1988-03-31 1988-03-31 リニア駆動装置におけるカップリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988041903U JPH0735716Y2 (ja) 1988-03-31 1988-03-31 リニア駆動装置におけるカップリング装置

Publications (2)

Publication Number Publication Date
JPH01148247U JPH01148247U (en]) 1989-10-13
JPH0735716Y2 true JPH0735716Y2 (ja) 1995-08-16

Family

ID=31268329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988041903U Expired - Lifetime JPH0735716Y2 (ja) 1988-03-31 1988-03-31 リニア駆動装置におけるカップリング装置

Country Status (1)

Country Link
JP (1) JPH0735716Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122746Y2 (en]) * 1981-05-11 1986-07-08
JPS6048239A (ja) * 1983-08-24 1985-03-15 Hitachi Ltd 精密送り装置
JPH0673788B2 (ja) * 1985-10-14 1994-09-21 株式会社アマダ 工作機械のテ−ブル駆動用リニアモ−タ

Also Published As

Publication number Publication date
JPH01148247U (en]) 1989-10-13

Similar Documents

Publication Publication Date Title
US4884941A (en) Active compliant end-effector with force, angular position, and angular velocity sensing
WO1990011622A1 (en) High resolution electromechanical translation device
US5013958A (en) X-Y stage with ultrasonic actuator
JPH0735716Y2 (ja) リニア駆動装置におけるカップリング装置
WO2024032053A1 (zh) 用于高硬脆材料激光超精密抛光的纳米微位移工作台
JPH05277870A (ja) 駆動装置及びこれを具備したｘｙ駆動装置
JPS6170954U (en])
JPS6153577B2 (en])
US5301933A (en) Sample moving device
JPH01109047A (ja) 位置決め機構
JPS61182112A (ja) 精密変位駆動装置
JPH0646246B2 (ja) 微動移動機構
JPH0141466B2 (en])
SU1364427A1 (ru) Двухкоординатный стол
CN219733933U (zh) 一种多功能柔性铰链
CN112247920B (zh) 一种大行程的单自由度定位平台
JPS6288528A (ja) Ｘｙステ−ジ
JP3803263B2 (ja) ＸＹθテーブル
JPH08111Y2 (ja) 微動ステージ装置
JPH0683980B2 (ja) ロボット用ハンド
JPH01238759A (ja) ６自由度精密微動台
JPH03234488A (ja) 直角座標形ロボット
JPH0355181U (en])
KR940016685A (ko) 힌지/힌지바를 이용한 3축 운동의 단판 (monolithi) 정밀 구동장치.
JPS62231473A (ja) フロツピ−デイスクドライブのキヤリツジ駆動機構